Saving costs under perfect conditions
Working under perfect conditions and saving considerable costs is possible with the newly developed metal-free wet-dry workbench, which the special equipment manufacturer MK Versuchsanlagen und Laborbedarf e.K. brings to the market.
The wet-dry workbench, designed as a mini environment, ensures maximum cleanliness on the spot. This is particularly interesting for work processes in semiconductor technology, where the need for the highest levels of cleanliness is only required directly at the workplace (clean room class ISO 3).
Reduction of energy consumption of up to 50 percent in air management is possible
Like all other metal-free systems from MK Versuchsanlagen, the wet-dry workbench is equipped with a ventilation system developed by MK Versuchsanlagen itself, which leads to a significant reduction in energy consumption. The developers assume that energy savings of up to 50 per cent are possible in air conditioning by intelligent air management. Of particular interest is the fact that retrofitting in existing clean rooms is easily possible by means of a special ventilation concept, even in the case of critical room ventilation systems, and thus the energy-saving effect can also be realized here. It goes without saying that the metal-free workbenches also offer maximum corrosion and product protection.
Quelle: reinraum Jahrbuch 2020, s.156f
Self-developed hardware and software enables easy integration into existing systems
A Quick Dump Rinse (QDR) basin can be integrated into the wet-dry workbench for cleaning semiconductor plates. The QDR basin has a modular design and is divided into process basins and collecting basins. In the process basin the cleaning of the semiconductor plates or the wafer carrier is carried out. The cleaning is done by a spray system, which fills the basin with high purity water and stops the etching process on the semiconductor wafers. In order to remove the impurities from the semiconductor plates, they are flushed out by the suction created when the valve is opened.
Like all hardware from MK Versuchsanlagen, the software is also a proprietary development of the special equipment manufacturer. This has the great advantage that an integration into existing, superordinate digital systems can be realized much easier. The direct GLT integration is possible as well as the connection to LIMS or MES systems via an OPC UA interface (industry 4.0). Thus it is possible to create an optimal environment that integrates all processes and process devices into the minienvironments.
(Quelle: Reinraum Jahrbuch 2020, S. 156f.)